KL NPR is a negative tone, novolac photoresist designed for electroplating, metal deposition, TSV, and RIE etch. It has a single coat film thickness of up to 20 µm and features vertical sidewalls and high aspect ratios. KL NPR is thermally stable and can withstand temperatures up to 130⁰C without profile degradation.
 
Tone:                          Negative
Film Thickness:     Up to 20 µm (single spin coat)
Sensitivity:              Broadband, i-line
Developer:               Industry standard TMAH, KOH, etc.
Remover:                 Industry standard NMP, DMSO, etc.
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Volumes & Customization
Sizes available: 100ml sample, 500ml, 1L, 4L
Production volumes available
Custom thicknesses available by request